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[1]沈武林,马志斌*,谭必松.磁场位形对微波ECR等离子体电子参数的影响[J].武汉工程大学学报,2010,(09):53-57.[doi:10.3969/j.issn.16742869.2010.09.015]
　SHEN Wu lin,MA Zhi bin,TAN Bi song.The effects of magnetic field configuration on the electron parameters of microwave ECR plasma[J].Journal of Wuhan Institute of Technology,2010,(09):53-57.[doi:10.3969/j.issn.16742869.2010.09.015]
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磁场位形对微波ECR等离子体电子参数的影响(/HTML)
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
期数:
2010年09期
页码:
53-57
栏目:
机电与信息工程
出版日期:
2010-09-30

文章信息/Info

Title:
The effects of magnetic field configuration on the electron
parameters of microwave ECR plasma
文章编号:
16742869(2010)09005305
作者:
沈武林; 马志斌*; 谭必松
武汉工程大学材料科学与工程学院,武汉工程大学湖北省
等离子体化学与新材料重点实验室,湖北 武汉 430074
Author(s):
SHEN Wulin; MA Zhibin; TAN Bisong
School of Material Science and Engineering,Key Laboratory of Plasma Chemical and Advanced Materials
of Hubei Province, Wuhan Institute of Technology,Wuhan 430074,China
关键词:
ECR等离子体; 发散场; 磁镜场
Keywords:
ECR plasma;  divergence magnetic field;  mirror magnetic field
分类号:
O539
DOI:
10.3969/j.issn.16742869.2010.09.015
文献标志码:
A
摘要:
测量了两种磁场位形中微波ECR等离子体的电子参数,研究了磁场位形对电子参数空间分布的影响,结果表明:发散场中电子温度在轴心和腔体边缘较大,在过渡的中间区域较小,而磁镜场中电子温度随径向半径R的增大单调减小;电子密度在两种磁场位形中随径向和轴向距离的增大均呈单调下降的趋势,磁镜场中的下降幅度大于发散场;在共振面附近,发散场中气压对电子温度的影响比在磁镜场中大,而气压对电子密度的影响在两种磁场位形中基本相似.
Abstract:
The electron parameters of a microwave electron cyclotron resonance (ECR) plasma operated in two kinds of magnetic field were measured with Langmuir probe.The effects of magnetic field configuration on the spatial distribution of the electron parameters were investigated.The results indicated that: in divergence magnetic field configuration, the electron temperatures at the axial and edge of cylindrical vacuum are higher than that of intermediate area while it decreases monotonically with increasing radius R in a mirror magnetic field. The electron density all decline with increasing the radial and axial distance in the divergence and mirror magnetic field configuration, but the decline extent of mirror field is larger than that of divergence field. The gas pressure has more influence on the electron temperature in divergence magnetic field than in mirror magnetic field at the vicinity of resonance surface,while it has same effect on the electron density in both of the magnetic field.

参考文献/References:

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备注/Memo

备注/Memo:
收稿日期:20100429基金项目:国家自然科学基金(10875093)作者简介:沈武林(1985),男,四川乐山人,硕士研究生.研究方向:等离子体技术与薄膜材料.指导老师:马志斌,男,博士,教授.研究方向:低温等离子体技术及其应用.*
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