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[1]汪建华,刘鹏飞,熊礼威,等.大面积金刚石膜生长过程中的缺陷和内应力[J].武汉工程大学学报,2012,(06):38-41.[doi:103969/jissn16742869201206010]
　WANG Jian\|hua,LIU Peng\|fei,XIONG Li\|wei,et al.Defect and internal stress of the growth of large area diamond films[J].Journal of Wuhan Institute of Technology,2012,(06):38-41.[doi:103969/jissn16742869201206010]
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大面积金刚石膜生长过程中的缺陷和内应力
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
期数:
2012年06期
页码:
38-41
栏目:
资源与土木工程
出版日期:
2012-06-30

文章信息/Info

Title:
Defect and internal stress of the growth of large area diamond films
文章编号:
16742869(2012)06003804
作者:
汪建华; 刘鹏飞; 熊礼威; 刘繁; 江川; 苏含
武汉工程大学材料科学与工程学院，湖北 武汉 430074
Author(s):
WANG Jian\|hua; LIU Peng\|fei; XIONG Li\|wei; LIU Fan; JIANG Chuan; SU Han
School of Materials Science and Engineering，Wuhan Institute of Technology,Wuhan 430074,China
关键词:
金刚石膜;  微波等离子体;  化学气相沉积;  内应力
Keywords:
diamond films;  microwave plasma;  chemical vapor deposition;  internal stress
分类号:
O539
DOI:
103969/jissn16742869201206010
文献标志码:
A
摘要:
采用甲烷和氢气作为气源，在直径为50 mm的抛光单晶硅片上，利用新型微波等离子体化学气相沉积（MPCVD）装置制备出金刚石膜.用扫描电子显微镜观测金刚石膜的表面形貌，利用激光Raman光谱表征金刚石膜的质量以及X射线衍射检测金刚石膜的成分和晶界缺陷.结果表明V（CH4）/V（H2）为1%，基片温度为845 ℃时，生长金刚石膜的质量较好，并且具有完整的晶体形貌，但是扫描电子显微镜图×5 000倍时，观察到金刚石膜中明显的晶体缺陷存在，同时X射线衍射图表明金刚石膜的内应力较大.
Abstract:
Diamond films were made by new novel microwave plasma chemical vapor deposition(MPCVD) on mirror polishing silicon plate of diameter 50 mm,methane and hydrogen as gas source. The surface morphology of diamond films was observed by scanning electron microscopy(SEM),the quality of diamond films was tested by laser Raman spectroscopic and diamond films composition and grain boundary defects were detected by X-Ray diffraction(XRD). The results show that diamond films grow quite well and have complete crystal shape when the substrate temperature is 845 ℃ and the rate of V（CH4）/V（H2） is one percent. But SEM images in ×5000 times,crystal defects existing in diamond films are observed,and the XRD diagram shows high internal stress of diamond films.

参考文献/References:

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［8］Andrea C Ferrari,John Robertson. Raman Spectroscopy in Carbon: from Nanotubes to Diamond［M］.谭平恒,译.北京:化学工业出版社，2007:149-150.
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相似文献/References:

[1]汪建华,苏帆,翁俊,等.甲烷浓度对金刚石膜沉积质量的影响[J].武汉工程大学学报,2014,(05):29.[doi:103969/jissn16742869201405007]
　WANG Jian hua,SU Fan,WENG Jun,et al.Effect of methane concentration on quality of diamond film deposition[J].Journal of Wuhan Institute of Technology,2014,(06):29.[doi:103969/jissn16742869201405007]
[2]汪建华,胡晖,翁俊.微波法金刚石膜的均匀沉积[J].武汉工程大学学报,2014,(06):14.[doi:103969/jissn16742869201406004]
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[4]徐　政,汪建华,翁　俊.氮氧混合气体对沉积金刚石膜的影响[J].武汉工程大学学报,2015,37(02):30.[doi:10. 3969/j. issn. 1674-2869. 2015. 02. 007]
　,Ｉｎｆｌｕｅｎｃｅ ｏｆ ｏｘｙｇｅｎ ａｎｄ ｎｉｔｒｏｇｅｎ ｍｉｘｔｕｒｅｓ ａｄｄｉｔｉｏｎ ｏｎｄｅｐｏｓｉｔｅｄ ｄｉａｍｏｎｄ ｆｉｌｍ[J].Journal of Wuhan Institute of Technology,2015,37(06):30.[doi:10. 3969/j. issn. 1674-2869. 2015. 02. 007]

备注/Memo

备注/Memo:
收稿日期：20120316基金项目：国家自然科学基金（No. 11175137）；武汉工程大学科学研究基金（No. 11111051）作者简介：汪建华（1955-），男，湖北武汉人，教授，博士，博士生导师. 研究方向：低温等离子体与新材料技术.
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