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[1]马志斌,陶利平,翁国峰,等.微波等离子体化学气相沉积金刚石光谱分析[J].武汉工程大学学报,2012,(06):49-52.[doi:103969/jissn16742869201206012]
　MA Zhi\|bin,TAO Li\|ping,WENG Guo\|feng,et al.Spectroscopic analysis of microwave plasma for chemical vapor deposition diamond [J].Journal of Wuhan Institute of Technology,2012,(06):49-52.[doi:103969/jissn16742869201206012]
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微波等离子体化学气相沉积金刚石光谱分析(/HTML)
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《武汉工程大学学报》[ISSN:1674-2869/CN:42-1779/TQ]

卷:
期数:
2012年06期
页码:
49-52
栏目:
资源与土木工程
出版日期:
2012-06-30

文章信息/Info

Title:
Spectroscopic analysis of microwave plasma for
chemical vapor deposition diamond
文章编号:
16742869(2012)06004904
作者:
马志斌; 陶利平; 翁国峰; 严垒
武汉工程大学材料科学与工程学院，湖北省等离子体化学与新材料重点实验室,湖北 武汉 430074
Author(s):
MA Zhi\|bin; TAO Li\|ping; WENG Guo\|feng; YAN lei
School of Materials Science and Engineering,Wuhan Institute of Technology,Key of Laboratory of
Plasma Chemistry and Advanced Materials of Hubei Province,Wuhan 430074,China
关键词:
等离子体光谱; 金刚石; 基团; 空间分布; 甲烷浓度
Keywords:
optical emission spectroscopy;  diamond;  radicals;  space distribution;  methane concentration
分类号:
TL65
DOI:
103969/jissn16742869201206012
文献标志码:
A
摘要:
采用等离子体光谱分析微波等离子体化学气相（MPCVD）沉积金刚石过程中基团的空间分布及甲烷浓度变化时基团浓度的变化情况.实验过程中分别测量了氢原子的Hα (656.19 nm)、Hβ(486.71 nm)和Hγ(434.56 nm)谱线，以及基团CH(431.31 nm)、C2(515.63 nm)谱线.结果表明：氢原子和基团CH、C2的浓度沿等离子体柱的径向先增加再减小.随着甲烷浓度逐步增加，氢原子及基团CH、C2的浓度相应增加，其中C2基团所受影响最大.
Abstract:
Optical emission spectroscopy was used to analyse the space distribution and variation with methane concentration of the radicals,which appeared in the microwave plasma for diamond deposition.In experiment，Hα(656.19 nm),Hβ(486.71 nm)and Hγ(434.56 nm) of atomic hydrogen and radicals of CH(431.31 nm) and C2(515.63 nm) were measured respectively.The results show that the intensities of atomic hydrogen and radicals of CH and C2 increase and then decrease along the radical direction of the plasma column,the intensities of atomic hydrogen and radicals of CH and C2 increase with the increasing of the methane concentration,in which the radical C2 is effected most.

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相似文献/References:

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备注/Memo

备注/Memo:
收稿日期：20120323基金项目：国家自然科学基金（10875093）作者简介：马志斌（1968-），男，湖北京山人，教授，博士.研究方向：低温等离子体技术及其应用.
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